JPH0378232B2 - - Google Patents

Info

Publication number
JPH0378232B2
JPH0378232B2 JP13967286A JP13967286A JPH0378232B2 JP H0378232 B2 JPH0378232 B2 JP H0378232B2 JP 13967286 A JP13967286 A JP 13967286A JP 13967286 A JP13967286 A JP 13967286A JP H0378232 B2 JPH0378232 B2 JP H0378232B2
Authority
JP
Japan
Prior art keywords
grip device
claw
plate
wafer
rods
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13967286A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62295840A (ja
Inventor
Takeshi Yoshihara
Shigeji Fukui
Keiji Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinmaywa Industries Ltd
Original Assignee
Shin Meiva Industry Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Meiva Industry Ltd filed Critical Shin Meiva Industry Ltd
Priority to JP13967286A priority Critical patent/JPS62295840A/ja
Publication of JPS62295840A publication Critical patent/JPS62295840A/ja
Publication of JPH0378232B2 publication Critical patent/JPH0378232B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manipulator (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP13967286A 1986-06-16 1986-06-16 グリツプ装置 Granted JPS62295840A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13967286A JPS62295840A (ja) 1986-06-16 1986-06-16 グリツプ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13967286A JPS62295840A (ja) 1986-06-16 1986-06-16 グリツプ装置

Publications (2)

Publication Number Publication Date
JPS62295840A JPS62295840A (ja) 1987-12-23
JPH0378232B2 true JPH0378232B2 (en]) 1991-12-13

Family

ID=15250732

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13967286A Granted JPS62295840A (ja) 1986-06-16 1986-06-16 グリツプ装置

Country Status (1)

Country Link
JP (1) JPS62295840A (en])

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02104990U (en]) * 1989-02-07 1990-08-21
JPH0410529A (ja) * 1990-04-27 1992-01-14 Shin Etsu Handotai Co Ltd サセプタ及びウエーハ自動脱着装置
US6988879B2 (en) * 2002-10-18 2006-01-24 Asm Technology Singapore Pte Ltd Apparatus and method for reducing substrate warpage
JP2008049418A (ja) * 2006-08-23 2008-03-06 Nachi Fujikoshi Corp 産業用ロボットのハンド装置
US9082801B2 (en) 2012-09-05 2015-07-14 Industrial Technology Research Institute Rotatable locating apparatus with dome carrier and operating method thereof
US9373534B2 (en) 2012-09-05 2016-06-21 Industrial Technology Research Institute Rotary positioning apparatus with dome carrier, automatic pick-and-place system, and operating method thereof
JP6172651B2 (ja) * 2013-01-21 2017-08-02 国立研究開発法人産業技術総合研究所 電動把持装置
CN105563509B (zh) * 2014-10-13 2018-02-09 北京自动化控制设备研究所 一种提高刚性连杆式夹持结构
CN105563510B (zh) * 2014-10-13 2017-12-26 北京自动化控制设备研究所 一种多功能末端夹持器
CN104505364A (zh) * 2014-12-26 2015-04-08 苏州凯锝微电子有限公司 一种晶圆可旋转的夹持装置
JP7682467B2 (ja) * 2021-06-11 2025-05-26 国立大学法人北海道国立大学機構 ロボットハンド及びロボットハンドを備えたつる性作物収穫装置
FR3128656B1 (fr) * 2021-11-04 2024-01-19 Commissariat Energie Atomique Préhenseur

Also Published As

Publication number Publication date
JPS62295840A (ja) 1987-12-23

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